Atomic Layer-by-Layer MOCVD of Oxide Superconductors
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چکیده
منابع مشابه
Atomic Layer-by-Layer MOCVD of Oxide Superconductors
A very smooth surface film of c-axis oriented Y B a z C w G (YBCO) with roughness of less than monomolecular layer over lOpmxlO~rn, free of precipitates, has been obtained by atomic layer-by-layer metalorganic chemical vapor deposition (MOCVD) on a SrTi03 substrate at 650°C. A very large terrace length of 0.3-0.5pm may be due to the enhanced migration of growing species on the surface. The resu...
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I Acknowledgements II Dedication III List of Figures V
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ژورنال
عنوان ژورنال: Le Journal de Physique IV
سال: 1995
ISSN: 1155-4339
DOI: 10.1051/jphyscol:1995545